Fraunhofer IST

Gentle high-temperature crystallisation: Fraunhofer ILT, together with Fraunhofer ISIT and IST, has developed a selective, laser-based crystallisation process for the manufacture of MEMS sensor units directly on active circuits. (Image: Fraunhofer ILT)

Laser process to optimise MEMS sensor size and performance

Researchers are using laser-based crystallisation to eliminate the need for wires and solder joints in the monolithic integration of MEMS sensors

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