Evana Technologies' Freezer series of compact ultrashort laser pulse optical engines are cable of scribing wafers made of hard and brittle material, including: silicon carbide, gallium nitride, sapphire, quartz, lithium niobate, lithium tantalate and the other material wafers for microelectronics and photonics industries.
The optical engines are all less than 450mm x 450mm x 750mm in size, are highly stable, reliable, and easy to integrate.
The series offers a range of built in features, including a surface recognition system, an autofocus system, adustable vertical focal points, and a sample visualisation system. High versatility in optical power, pulse duration and frequency adjustments are also offered.
Freezer optical engines are capable of scribing wafers with thicknesses up to and above 300µm, offer speeds up to and above 300mm/s with high accuracy, high throughput, and no chipping. It is also possible to scribe uncoated wafers using them. Solutions are also available for metal coated SiC wafers, DBR coated sapphire wafers, and dielectrics coated wafers.